P

Inventor

SCHUHMACHER MANFRED

DE10 patents
⚠️ This page may combine multiple inventors who share the name “SCHUHMACHER MANFRED”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LEYBOLD AG

7 patents
US4943363AJul 24, 1990

Cathode sputtering system

LEYBOLD AG27 citations92
US5944967AAug 31, 1999

Dual target cathode assembly with shielding

LEYBOLD AG38 citations90
US5662784ASep 2, 1997

Apparatus for applying thin layers to a substrate

LEYBOLD AG19 citations89
US5421978AJun 6, 1995

Target cooling system with trough

LEYBOLD AG36 citations86
US4984531AJan 15, 1991

Device for accepting and holding a workpiece in vacuum coating apparatus

LEYBOLD AG10 citations73
US5232572AAug 3, 1993

Device for the releasable fastening of a target or target base on a cathode mounting

LEYBOLD AG11 citations70
US5616226AApr 1, 1997

Cathode assembly

LEYBOLD AG4 citations60

BEYBOLD SYSTEMS GMBH

1 patent
US6302372B1Oct 16, 2001

Gate valve

BEYBOLD SYSTEMS GMBH42 citations86

LEYBOLD SYSTEM GMBH

1 patent
US5898127AApr 27, 1999

Apparatus for shielding against high-frequency electromagnetic radiation

LEYBOLD SYSTEM GMBH20 citations83

LEYBOLD SYSTEMS GMBH

1 patent
US6187158B1Feb 13, 2001

Device for coating plate-shaped substrates

LEYBOLD SYSTEMS GMBH0 citations45