Inventor
MARQUARDT DIETMAR
DE5 patents
⚠️ This page may combine multiple inventors who share the name “MARQUARDT DIETMAR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LEYBOLD AG
4 patentsUS5683560ANov 4, 1997
Cathode assembly
LEYBOLD AG19 citations91
US5944967AAug 31, 1999
Dual target cathode assembly with shielding
LEYBOLD AG38 citations90
US5662784ASep 2, 1997
Apparatus for applying thin layers to a substrate
LEYBOLD AG19 citations89
US5616226AApr 1, 1997
Cathode assembly
LEYBOLD AG4 citations60