Inventor
FUERTSCH MATTHIAS
DE7 patents
Patents
7 patentsUS7148077B2Dec 12, 2006
Micromechanical structural element having a diaphragm and method for producing such a structural element
BOSCH GMBH ROBERT27 citations91
US7025163B2Apr 11, 2006
Device for detecting a deformation of a component
BOSCH GMBH ROBERT20 citations89
US6523403B1Feb 25, 2003
Mass flow sensor
BOSCH GMBH ROBERT18 citations83
US7060197B2Jun 13, 2006
Micromechanical mass flow sensor and method for the production thereof
BOSCH GMBH ROBERT10 citations71
US7740459B2Jun 22, 2010
Micropump having a pump diaphragm and a polysilicon layer
BOSCH GMBH ROBERT6 citations61
US6251699B1Jun 26, 2001
Method for fabricating micromechanical components
BOSCH GMBH ROBERT3 citations61
US7279759B2Oct 9, 2007
Membrane sensor
BOSCH GMBH ROBERT0 citations51