Inventor

RANGACHARI MURALI D

US2 patents

⚠️ This page may combine multiple inventors who share the name “RANGACHARI MURALI D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

(unassigned)

1 patent

US6470227B1Oct 22, 2002

Method and apparatus for automating a microelectric manufacturing process

121 citations96

ASYST TECHNOLOGIES

1 patent

US6810294B2Oct 26, 2004

Method and apparatus for automating a microelectronic manufacturing process

ASYST TECHNOLOGIES28 citations91