Inventor

TOBA KATSUYA

JP3 patents

⚠️ This page may combine multiple inventors who share the name “TOBA KATSUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

1 patent

US6957956B2Oct 25, 2005

Vertical heat treating equipment

TOKYO ELECTRON LTD12 citations81

ASARI SATOSHI

1 patent

US8940096B2Jan 27, 2015

Vertical thermal processing apparatus and substrate supporter

ASARI SATOSHI2 citations54

TOBA KATSUYA

1 patent

US9230843B2Jan 5, 2016

Loading unit and processing system

TOBA KATSUYA1 citations38