Inventor
VAN DEN WILDENBERG LAMBERTUS ADRIANUS
NL5 patents
⚠️ This page may combine multiple inventors who share the name “VAN DEN WILDENBERG LAMBERTUS ADRIANUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
3 patentsUS7612353B2Nov 3, 2009
Lithographic apparatus, contaminant trap, and device manufacturing method
ASML NETHERLANDS BV8 citations79
US7767989B2Aug 3, 2010
Ex-situ removal of deposition on an optical element
ASML NETHERLANDS BV1 citations60
US7525635B2Apr 28, 2009
Contamination barrier and lithographic apparatus
ASML NETHERLANDS BV2 citations57