Inventor
BRABANT PAUL
US5 patents
⚠️ This page may combine multiple inventors who share the name “BRABANT PAUL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM INC
4 patentsUS7816236B2Oct 19, 2010
Selective deposition of silicon-containing films
ASM INC42 citations94
US7648579B2Jan 19, 2010
Substrate support system for reduced autodoping and backside deposition
ASM INC42 citations89
US7479443B2Jan 20, 2009
Germanium deposition
ASM INC16 citations89
US7329593B2Feb 12, 2008
Germanium deposition
ASM INC31 citations89