Inventor

LEE ILSONG

US3 patents

⚠️ This page may combine multiple inventors who share the name “LEE ILSONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SYNOS TECHNOLOGY INC

2 patents

US9145608B2Sep 29, 2015

Scanning injector assembly module for processing substrate

SYNOS TECHNOLOGY INC1 citations44

US9177788B2Nov 3, 2015

Plasma reactor with conductive member in reaction chamber for shielding substrate from undesirable irradiation

SYNOS TECHNOLOGY INC0 citations43

VEECO ALD INC

1 patent

US9558963B2Jan 31, 2017

Plasma reactor with conductive member in reaction chamber for shielding substrate from undesirable irradiation

VEECO ALD INC0 citations45