Inventor

KARDOKUS JANINE

US5 patents

⚠️ This page may combine multiple inventors who share the name “KARDOKUS JANINE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

2 patents

US7022948B2Apr 4, 2006

Chamber for uniform substrate heating

APPLIED MATERIALS INC23 citations91

US6765178B2Jul 20, 2004

Chamber for uniform substrate heating

APPLIED MATERIALS INC37 citations91

ASML NETHERLANDS BV

2 patents

US11317501B2Apr 26, 2022

Method of purifying target material for an EUV light source

ASML NETHERLANDS BV0 citations55

US10455680B2Oct 22, 2019

Method and apparatus for purifying target material for EUV light source

ASML NETHERLANDS BV0 citations45

Cymer LLC

1 patent

US9246298B2Jan 26, 2016

Corrosion resistant electrodes for laser chambers

Cymer LLC1 citations51