Inventor
BÖHM CHRISTOPH
CH5 patents
Patents
5 patentsUS10520109B2Dec 31, 2019
Vacuum valve with optical sensor
VAT HOLDING AG9 citations81
US10975896B2Apr 13, 2021
Pneumatic valve drive
VAT HOLDING AG5 citations69
US11543051B2Jan 3, 2023
Vacuum valve with position sensor
VAT HOLDING AG2 citations64
US10683942B2Jun 16, 2020
Vacuum valve for closing a flow path with a two-part valve disk
VAT HOLDING AG1 citations54
US11204107B2Dec 21, 2021
Vacuum valve system for a regulated operation of a vacuum process
VAT HOLDING AG0 citations49