Inventor
OTANI YUKO
JP20 patents
⚠️ This page may combine multiple inventors who share the name “OTANI YUKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
14 patentsUS9436990B2Sep 6, 2016
Defect observation method and device therefor
HITACHI HIGH TECH CORP15 citations84
US10267745B2Apr 23, 2019
Defect detection method and defect detection device and defect observation device provided with same
HITACHI HIGH TECH CORP7 citations83
US11802841B2Oct 31, 2023
Defect detection device, defect detection method, and defect observation device
HITACHI HIGH TECH CORP2 citations73
US10401300B2Sep 3, 2019
Defect observation method and device and defect detection device
HITACHI HIGH TECH CORP4 citations73
US10228332B2Mar 12, 2019
Defect inspection device and defect inspection method
HITACHI HIGH TECH CORP2 citations73
US9683946B2Jun 20, 2017
Method and device for detecting defects and method and device for observing defects
HITACHI HIGH TECH CORP4 citations73
US10593062B2Mar 17, 2020
Defect observation apparatus
HITACHI HIGH TECH CORP2 citations72
US10436576B2Oct 8, 2019
Defect reviewing method and device
HITACHI HIGH TECH CORP5 citations72
US9733194B2Aug 15, 2017
Method for reviewing a defect and apparatus
HITACHI HIGH TECH CORP2 citations72
US10642164B2May 5, 2020
Defect detection device and defect observation device
HITACHI HIGH TECH CORP3 citations70
US9759666B2Sep 12, 2017
Defect detection method and defect detection device and defect observation device provided with same
HITACHI HIGH TECH CORP1 citations62
US11982631B2May 14, 2024
Defect detection device, defect detection method, and defect observation apparatus including defect detection device
HITACHI HIGH TECH CORP0 citations52
US9217718B2Dec 22, 2015
Defect detection method and defect detection device and defect observation device provided with same
HITACHI HIGH TECH CORP0 citations51
US10770260B2Sep 8, 2020
Defect observation device
HITACHI HIGH TECH CORP0 citations34