Inventor

MINEKAWA YOHEI

JP18 patents

⚠️ This page may combine multiple inventors who share the name “MINEKAWA YOHEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MINEKAWA YOHEI

HITACHI HIGH TECH CORP

Defect observation apparatus

Defect reviewing method and device

Sample observation device and method

Defect observation system and defect observation method for semiconductor wafer

Defect quantification method, defect quantification device, and defect evaluation value display device

Defect observation device

Defect classification device and defect classification program

Wafer observation apparatus and wafer observation method

Sample observation system and image processing method

Defect inspecting system and defect inspecting method

Charged particle beam device

Defect classification apparatus and defect classification method

Defect image classification apparatus

Defect observation device

MINEKAWA YOHEI

Defect classification method, and defect classification system

Method and apparatus for reviewing defect

Defect observation method and defect observation device

ONO MAKOTO

Device for classifying defects and method for adjusting classification