Inventor

KANZAKI NOBUHIKO

JP3 patents

Patents

3 patents

US10642164B2May 5, 2020

Defect detection device and defect observation device

HITACHI HIGH TECH CORP3 citations70

US11668892B2Jun 6, 2023

Alignment device and optical device

HITACHI HIGH TECH CORP0 citations40

US10770260B2Sep 8, 2020

Defect observation device

HITACHI HIGH TECH CORP0 citations34