Inventor
HIRAI TAKEHIRO
JP86 patents
⚠️ This page may combine multiple inventors who share the name “HIRAI TAKEHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
18 patentsUS7485858B1Feb 3, 2009
Inspection method for semiconductor wafer and apparatus for reviewing defects
HITACHI HIGH TECH CORP23 citations93
US9305343B2Apr 5, 2016
Observation device and observation method
HITACHI HIGH TECH CORP7 citations84
US7873205B2Jan 18, 2011
Apparatus and method for classifying defects using multiple classification modules
HITACHI HIGH TECH CORP9 citations84
US7449898B2Nov 11, 2008
Method and apparatus for reviewing defects by detecting images having voltage contrast
HITACHI HIGH TECH CORP14 citations84
US7584012B2Sep 1, 2009
Automatic defect review and classification system
HITACHI HIGH TECH CORP5 citations74
US9922414B2Mar 20, 2018
Defect inspection method and defect inspection device
HITACHI HIGH TECH CORP4 citations73
US9569836B2Feb 14, 2017
Defect observation method and defect observation device
HITACHI HIGH TECH CORP5 citations73
US10810733B2Oct 20, 2020
Defect classification apparatus and defect classification method
HITACHI HIGH TECH CORP5 citations72
US10559074B2Feb 11, 2020
Sample observation device and sample observation method
HITACHI HIGH TECH CORP2 citations72
US9811897B2Nov 7, 2017
Defect observation method and defect observation device
HITACHI HIGH TECH CORP3 citations72
US9733194B2Aug 15, 2017
Method for reviewing a defect and apparatus
HITACHI HIGH TECH CORP2 citations72
US7836398B2Nov 16, 2010
Report format setting method and apparatus, and defect review system
HITACHI HIGH TECH CORP4 citations63
US7664562B2Feb 16, 2010
Automatic defect review and classification system
HITACHI HIGH TECH CORP2 citations63
US7656171B2Feb 2, 2010
Method and apparatus for reviewing defects by detecting images having voltage contrast
HITACHI HIGH TECH CORP5 citations63
US11170483B2Nov 9, 2021
Sample observation device and sample observation method
HITACHI HIGH TECH CORP1 citations62
US11087454B2Aug 10, 2021
Defect observation device and defect observation method
HITACHI HIGH TECH CORP1 citations62
US10971325B2Apr 6, 2021
Defect observation system and defect observation method for semiconductor wafer
HITACHI HIGH TECH CORP1 citations62
US10297021B2May 21, 2019
Defect quantification method, defect quantification device, and defect evaluation value display device
HITACHI HIGH TECH CORP1 citations62
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD
17 patentsUS6140687AOct 31, 2000
High frequency ring gate MOSFET
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD215 citations99
US5736421AApr 7, 1998
Semiconductor device and associated fabrication method
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD78 citations96
US6770517B2Aug 3, 2004
Semiconductor device and method for fabricating the same
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD20 citations92
US6395598B1May 28, 2002
Semiconductor device and method for fabricating the same
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD26 citations92
US6337500B1Jan 8, 2002
Semiconductor device and method for fabricating the same
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD35 citations92
US6297517B1Oct 2, 2001
Semiconductor device and method of fabricating the same
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD24 citations92
US5905284AMay 18, 1999
Semiconductor device with a particular DMISFET structure
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD26 citations90
US5838048ANov 17, 1998
Semiconductor Bi-MIS device
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD14 citations73
US5696006ADec 9, 1997
Method of manufacturing Bi-MOS device
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD6 citations73
US5406106AApr 11, 1995
Semiconductor Bi-MIS device and method of manufacturing the same
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD13 citations73
US5331198AJul 19, 1994
Semiconductor device including IIL and vertical transistors
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD10 citations73
US5162252ANov 10, 1992
Method of fabricating iil and vertical complementary bipolar transistors
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD7 citations73
US5866463AFeb 2, 1999
Method of manufacturing a semiconductor apparatus
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD8 citations72
US5712174AJan 27, 1998
Method of manufacturing a bipolar transistor
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD9 citations72
US5851863ADec 22, 1998
Semiconductor device
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD8 citations71
US5817551AOct 6, 1998
Semiconductor device and method of manufacturing the same
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD15 citations71
US5204274AApr 20, 1993
Method of fabricating semiconductor device
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD10 citations71
MINEKAWA YOHEI
3 patentsUS9401015B2Jul 26, 2016
Defect classification method, and defect classification system
MINEKAWA YOHEI12 citations82
US9342879B2May 17, 2016
Method and apparatus for reviewing defect
MINEKAWA YOHEI3 citations71
US8824773B2Sep 2, 2014
Defect observation method and defect observation device
MINEKAWA YOHEI6 citations70
DAIICHI SANKYO CO LTD
2 patentsNAKAGAKI RYO
2 patentsUS8526710B2Sep 3, 2013
Defect review method and apparatus
NAKAGAKI RYO7 citations83
US9335277B2May 10, 2016
Region-of-interest determination apparatus, observation tool or inspection tool, region-of-interest determination method, and observation method or inspection method using region-of-interest determination method
NAKAGAKI RYO3 citations72
HARADA MINORU
2 patentsHIRAI TAKEHIRO
2 patentsHITACHI LTD
1 patentTAKAGI YUJI
1 patentHAYAKAWA KOICHI
1 patentOBARA KENJI
1 patentShowing the top 50 of 86 patents by PatentIndex Score.