Inventor

MARUMOTO GEN

JP3 patents

Patents

3 patents

US4615761AOct 7, 1986

Method of and apparatus for detecting an end point of plasma treatment

HITACHI LTD57 citations93

US4563240AJan 7, 1986

Method and apparatus for plasma process

HITACHI LTD117 citations93

US5118378AJun 2, 1992

Apparatus for detecting an end point of etching

HITACHI LTD35 citations87