Inventor
GIRARD GERALD
US2 patents
Patents
2 patentsUS6214160B1Apr 10, 2001
Method and apparatus for removing particulates from semiconductor substrates in plasma processing chambers
APPLIED MATERIALS INC23 citations91
US5779807AJul 14, 1998
Method and apparatus for removing particulates from semiconductor substrates in plasma processing chambers
APPLIED MATERIALS INC41 citations91