Inventor
CHRISTIAN CRAIG WILLIAM
US5 patents
Patents
5 patentsUS5914879AJun 22, 1999
System and method for calculating cluster tool performance metrics using a weighted configuration matrix
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US7324865B1Jan 29, 2008
Run-to-run control method for automated control of metal deposition processes
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US6630360B2Oct 7, 2003
Advanced process control (APC) of copper thickness for chemical mechanical planarization (CMP) optimization
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US6500681B1Dec 31, 2002
Run-to-run etch control by feeding forward measured metal thickness
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US6403151B1Jun 11, 2002
Method for controlling optical properties of antireflective coatings
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