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Inventor
MUTOU AKIYOSHI
JP
2 patents
Patents
2 patents
US6774409B2
Aug 10, 2004
Semiconductor device with NMOS including Si:C channel region and/or PMOS including SiGe channel region
SHARP KK
31 citations
89
US7172934B2
Feb 6, 2007
Method of manufacturing a semiconductor device with a silicon-germanium gate electrode
SHARP KK
4 citations
54