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Inventor
ANDIEL ULRICH
DE
2 patents
⚠️ This page may combine multiple inventors who share the name “ANDIEL ULRICH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
1 patent
US7919004B2
Apr 5, 2011
Removing reflective layers from EUV mirrors
ZEISS CARL SMT GMBH
3 citations
57
ZEISS CARL SMT AG
1 patent
US7602502B2
Oct 13, 2009
Methods of testing and manufacturing optical elements
ZEISS CARL SMT AG
2 citations
57