Inventor

FIGUEROA EFRAIN

US3 patents

⚠️ This page may combine multiple inventors who share the name “FIGUEROA EFRAIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FIGUEROA EFRAIN

1 patent

US8144739B2Mar 27, 2012

System method and apparatus for selecting and controlling light source bandwidth

FIGUEROA EFRAIN21 citations86

CYMER INC

1 patent

US7659529B2Feb 9, 2010

Method and apparatus for vibration reduction in laser system line narrowing unit wavelength selection optical element

CYMER INC3 citations56

Cymer LLC

1 patent

USRE45249ENov 18, 2014

System method and apparatus for selecting and controlling light source bandwidth

Cymer LLC0 citations49