Inventor

PAL SHYAM

US5 patents

⚠️ This page may combine multiple inventors who share the name “PAL SHYAM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GLOBALFOUNDRIES INC

4 patents

US10181420B2Jan 15, 2019

Devices with chamfer-less vias multi-patterning and methods for forming chamfer-less vias

GLOBALFOUNDRIES INC2 citations68

US9171735B2Oct 27, 2015

Method for fabricating a semiconductor integrated circuit with a litho-etch, litho-etch process for etching trenches

GLOBALFOUNDRIES INC1 citations47

US10056458B2Aug 21, 2018

Siloxane and organic-based MOL contact patterning

GLOBALFOUNDRIES INC0 citations39

US10026645B2Jul 17, 2018

Multiple patterning process for forming pillar mask elements

GLOBALFOUNDRIES INC0 citations26

CHARTERED SEMICONDUCTOR MFG

1 patent

US7601607B2Oct 13, 2009

Protruded contact and insertion of inter-layer-dielectric material to match damascene hardmask to improve undercut for low-k interconnects

CHARTERED SEMICONDUCTOR MFG8 citations80