Inventor
ANRYU YUKAKO
JP22 patents
⚠️ This page may combine multiple inventors who share the name “ANRYU YUKAKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SUMITOMO CHEMICAL CO
14 patentsUS11467490B2Oct 11, 2022
Salt, acid generator, resist composition and method for producing resist pattern
SUMITOMO CHEMICAL CO2 citations73
US11681220B2Jun 20, 2023
Resist composition and method for producing resist pattern
SUMITOMO CHEMICAL CO0 citations62
US11740555B2Aug 29, 2023
Resist composition and method for producing resist pattern
SUMITOMO CHEMICAL CO0 citations52
US11739056B2Aug 29, 2023
Carboxylate, carboxylic acid generator, resist composition and method for producing resist pattern
SUMITOMO CHEMICAL CO0 citations52
US9274421B2Mar 1, 2016
Salt and photoresist composition comprising the same
SUMITOMO CHEMICAL CO0 citations52
US11820735B2Nov 21, 2023
Salt, acid generator, resist composition and method for producing resist pattern
SUMITOMO CHEMICAL CO0 citations51
US11556056B2Jan 17, 2023
Salt, acid generator, resist composition and method for producing resist pattern
SUMITOMO CHEMICAL CO0 citations51
US11550218B2Jan 10, 2023
Salt, acid generator, resist composition and method for producing resist pattern
SUMITOMO CHEMICAL CO0 citations51
US11378883B2Jul 5, 2022
Salt, acid generator, resist composition and method for producing resist pattern
SUMITOMO CHEMICAL CO0 citations51
US9645490B2May 9, 2017
Salt, acid generator, photoresist composition, and method for producing photoresist pattern
SUMITOMO CHEMICAL CO0 citations51
US10359700B2Jul 23, 2019
Salt, acid generator, photoresist composition and process of producing photoresist pattern
SUMITOMO CHEMICAL CO0 citations41
US9771346B2Sep 26, 2017
Salt, acid generator, resist composition and method for producing resist pattern
SUMITOMO CHEMICAL CO0 citations41
US9348221B2May 24, 2016
Salt and photoresist composition comprising the same
SUMITOMO CHEMICAL CO0 citations41
US9951159B2Apr 24, 2018
Compound, resin, resist composition and method for producing resist pattern
SUMITOMO CHEMICAL CO0 citations34
ICHIKAWA KOJI
5 patentsUS8921029B2Dec 30, 2014
Resist composition and method for producing resist pattern
ICHIKAWA KOJI5 citations72
US8420294B2Apr 16, 2013
Salt and photoresist composition comprising the same
ICHIKAWA KOJI5 citations72
US8846294B2Sep 30, 2014
Photoresist composition
ICHIKAWA KOJI0 citations41
US8663900B2Mar 4, 2014
Resist composition and method for producing resist pattern
ICHIKAWA KOJI0 citations41
US8617790B2Dec 31, 2013
Photoresist composition and method for producing photoresist pattern
ICHIKAWA KOJI0 citations41
ANRYU YUKAKO
3 patentsUS8852846B2Oct 7, 2014
Salt and photoresist composition comprising the same
ANRYU YUKAKO8 citations81
US9051247B2Jun 9, 2015
Salt, photoresist composition, and method for producing photoresist pattern
ANRYU YUKAKO1 citations49
US9260407B2Feb 16, 2016
Salt and photoresist composition comprising the same
ANRYU YUKAKO0 citations39