Inventor
BRUNSVOLD WILLIAM ROSS
US5 patents
Patents
5 patentsUS6187505B1Feb 13, 2001
Radiation sensitive silicon-containing resists
IBM46 citations94
US6344305B1Feb 5, 2002
Radiation sensitive silicon-containing resists
IBM42 citations91
US5667938ASep 16, 1997
Acid scavengers for use in chemically amplified photoresists
IBM15 citations80
US5733705AMar 31, 1998
Acid Scavengers for use in chemically amplified photoresists
IBM13 citations78
US5644038AJul 1, 1997
Quinone diazo compound containing non-metallic atom
IBM0 citations47