Inventor
FERGUSON RICHARD A
US12 patents
Patents
12 patentsUS6578190B2Jun 10, 2003
Process window based optical proximity correction of lithographic images
IBM289 citations99
US7001693B2Feb 21, 2006
Binary OPC for assist feature layout optimization
IBM70 citations98
US5807649ASep 15, 1998
Lithographic patterning method and mask set therefor with light field trim mask
IBM187 citations98
US6223139B1Apr 24, 2001
Kernel-based fast aerial image computation for a large scale design of integrated circuit patterns
IBM124 citations97
US6184151B1Feb 6, 2001
Method for forming cornered images on a substrate and photomask formed thereby
IBM92 citations97
US5932377AAug 3, 1999
Exact transmission balanced alternating phase-shifting mask for photolithography
IBM86 citations96
US5959325ASep 28, 1999
Method for forming cornered images on a substrate and photomask formed thereby
IBM43 citations95
US7147976B2Dec 12, 2006
Binary OPC for assist feature layout optimization
IBM40 citations92
US6327033B1Dec 4, 2001
Detection of phase defects on photomasks by differential imaging
IBM37 citations92
US5936738AAug 10, 1999
Focus monitor for alternating phase shifted masks
IBM40 citations92
US5538833AJul 23, 1996
High resolution phase edge lithography without the need for a trim mask
IBM31 citations91
US6596442B1Jul 22, 2003
Asymmetric halftone biasing for sub-grid pattern adjustment
IBM6 citations62