Inventor

LOIZIDES WILLIAM K

US3 patents

Patents

3 patents

US6288403B1Sep 11, 2001

Decaborane ionizer

AXCELIS TECH INC89 citations96

US7078712B2Jul 18, 2006

In-situ monitoring on an ion implanter

AXCELIS TECH INC23 citations91

US6958481B2Oct 25, 2005

Decaborane ion source

AXCELIS TECH INC27 citations91