Inventor
LEE KUEN-CHYR
TW6 patents
Patents
6 patentsUS6734101B1May 11, 2004
Solution to the problem of copper hillocks
TAIWAN SEMICONDUCTOR MFG22 citations89
US7202142B2Apr 10, 2007
Method for producing low defect density strained -Si channel MOSFETS
TAIWAN SEMICONDUCTOR MFG13 citations83
US6982208B2Jan 3, 2006
Method for producing high throughput strained-Si channel MOSFETS
TAIWAN SEMICONDUCTOR MFG12 citations83
US7012009B2Mar 14, 2006
Method for improving the electrical continuity for a silicon-germanium film across a silicon/oxide/polysilicon surface using a novel two-temperature process
TAIWAN SEMICONDUCTOR MFG6 citations62
US6936530B1Aug 30, 2005
Deposition method for Si-Ge epi layer on different intermediate substrates
TAIWAN SEMICONDUCTOR MFG1 citations51
US6911369B2Jun 28, 2005
Discontinuity prevention for SiGe deposition
TAIWAN SEMICONDUCTOR MFG1 citations51