Inventor
BURMASTER ALLEN W
US3 patents
Patents
3 patentsUS6992025B2Jan 31, 2006
Strained silicon on insulator from film transfer and relaxation by hydrogen implantation
SHARP LAB OF AMERICA INC48 citations95
US7390725B2Jun 24, 2008
Strained silicon on insulator from film transfer and relaxation by hydrogen implantation
SHARP LAB OF AMERICA INC27 citations92
US6723643B1Apr 20, 2004
Method for chemical mechanical polishing of thin films using end-point indicator structures
SHARP LAB OF AMERICA INC25 citations91