Inventor
SOMA TAKESHI
JP4 patents
⚠️ This page may combine multiple inventors who share the name “SOMA TAKESHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
2 patentsUS7359069B2Apr 15, 2008
Polishing pad surface shape measuring instrument, method of using polishing pad surface shape measuring instrument, method of measuring apex angle of cone of polishing pad, method of measuring depth of groove of polishing pad, CMP polisher, and method of manufacturing semiconductor device
NIKON CORP18 citations91
US7486407B2Feb 3, 2009
Polishing pad surface shape measuring instrument, method of using polishing pad surface shape measuring instrument, method of measuring apex angle of cone of polishing pad, method of measuring depth of groove of polishing pad, CMP polisher, and method of manufacturing semiconductor device
NIKON CORP1 citations50