Inventor
AIKAWA KENJI
JP20 patents
Patents
20 patentsUS11427911B2Aug 30, 2022
Valve device, fluid control device and semiconductor manufacturing apparatus using the valve device
FUJIKIN KK9 citations85
US11365830B2Jun 21, 2022
Valve device, fluid control device and semiconductor manufacturing apparatus using the valve device
FUJIKIN KK3 citations73
US11231026B2Jan 25, 2022
Valve device
FUJIKIN KK5 citations73
US11162597B2Nov 2, 2021
Flow path assembly and valve device
FUJIKIN KK3 citations73
US10830367B2Nov 10, 2020
Fluid control system
FUJIKIN KK4 citations73
US11243549B2Feb 8, 2022
Valve and fluid supply line
FUJIKIN KK3 citations71
US11346505B2May 31, 2022
Fluid supply system, fluid control device, and semiconductor manufacturing device
FUJIKIN KK2 citations70
US11879560B2Jan 23, 2024
Flow-path forming block and fluid control device provided with flow-path forming block
FUJIKIN KK0 citations62
US11774000B2Oct 3, 2023
Fluid control device and manufacturing method for the fluid control device
FUJIKIN KK1 citations62
US11506290B2Nov 22, 2022
Valve apparatus, flow rate adjusting method, fluid control apparatus, flow rate control method, semiconductor manufacturing apparatus, and semiconductor manufacturing method
FUJIKIN KK1 citations62
US10962513B2Mar 30, 2021
Concentration detection method and pressure-type flow rate control device
FUJIKIN KK0 citations60
US11320056B2May 3, 2022
Valve device
FUJIKIN KK0 citations52
US11156305B2Oct 26, 2021
Fluid control system
FUJIKIN KK0 citations52
US11906062B2Feb 20, 2024
Fluid control device, joint block and manufacturing method for fluid control device
FUJIKIN KK0 citations51
US10125803B2Nov 13, 2018
Fixing device for lower level member and fluid control apparatus provided with the same
FUJIKIN KK1 citations51
US9810252B2Nov 7, 2017
Lower member fixing device and fluid control device provided with the same
FUJIKIN KK1 citations51
US12123517B2Oct 22, 2024
Valve, abnormality diagnosis method of valve
FUJIKIN KK0 citations50
US11340636B2May 24, 2022
Abnormality diagnosis method of fluid supply line
FUJIKIN KK0 citations50
US11397443B2Jul 26, 2022
Fluid control device and semiconductor manufacturing apparatus
FUJIKIN KK0 citations49
US11255458B2Feb 22, 2022
Valve device and fluid control device
FUJIKIN KK0 citations49