Inventor

KIMMEL KURT RUDOLF

US3 patents

Patents

3 patents

US5783309AJul 21, 1998

Recovery of an anodically bonded glass device from a substrate by use of a metal interlayer

IBM32 citations89

US5757879AMay 26, 1998

Tungsten absorber for x-ray mask

IBM9 citations72

US7807335B2Oct 5, 2010

Immersion lithography contamination gettering layer

IBM1 citations50