Inventor

VITKAVAGE SUSAN C

US6 patents

⚠️ This page may combine multiple inventors who share the name “VITKAVAGE SUSAN C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LUCENT TECHNOLOGIES INC

3 patents

US5858873AJan 12, 1999

Integrated circuit having amorphous silicide layer in contacts and vias and method of manufacture thereof

LUCENT TECHNOLOGIES INC45 citations95

US6028359AFeb 22, 2000

Integrated circuit having amorphous silicide layer in contacts and vias and method of manufacture therefor

LUCENT TECHNOLOGIES INC34 citations91

US5607543AMar 4, 1997

Integrated circuit etching

LUCENT TECHNOLOGIES INC20 citations88

AGERE SYST GUARDIAN CORP

1 patent

US6432814B1Aug 13, 2002

Method of manufacturing an interconnect structure having a passivation layer for preventing subsequent processing reactions

AGERE SYST GUARDIAN CORP31 citations91

AGERE SYSTEMS INC

1 patent

US6576980B1Jun 10, 2003

Surface treatment anneal of hydrogenated silicon-oxy-carbide dielectric layer

AGERE SYSTEMS INC20 citations90

AT & T BELL LAB

1 patent

US5244821ASep 14, 1993

Bipolar fabrication method

AT & T BELL LAB9 citations69