Inventor

SHIN KYOUNG-SU

KR2 patents

Patents

2 patents

US7220173B2May 22, 2007

Wafer holder and wafer conveyor system equipped with the same

SAMSUNG ELECTRONICS CO LTD2 citations59

US7666069B2Feb 23, 2010

Wafer holder and wafer conveyor equipped with the same

SAMSUNG ELECTRONICS CO LTD1 citations49