Inventor

HA IN-SU

KR4 patents

⚠️ This page may combine multiple inventors who share the name “HA IN-SU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAMSUNG ELECTRONICS CO LTD

3 patents

US6806135B2Oct 19, 2004

Method of manufacturing a semiconductor device using a two-step deposition process

SAMSUNG ELECTRONICS CO LTD5 citations60

US7141512B2Nov 28, 2006

Method of cleaning semiconductor device fabrication apparatus

SAMSUNG ELECTRONICS CO LTD2 citations56

US7538046B2May 26, 2009

Method of cleaning semiconductor device fabrication apparatus

SAMSUNG ELECTRONICS CO LTD0 citations45

LAM RES CORP

1 patent

US12531210B2Jan 20, 2026

Edge exclusion control

LAM RES CORP0 citations46