Inventor
SESHADRI INDIRA P
US7 patents
⚠️ This page may combine multiple inventors who share the name “SESHADRI INDIRA P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
6 patentsUS10049876B1Aug 14, 2018
Removal of trilayer resist without damage to underlying structure
IBM5 citations83
US10254652B2Apr 9, 2019
Approach to lowering extreme ultraviolet exposure dose for inorganic hardmasks for extreme ultraviolet patterning
IBM3 citations71
US10082736B2Sep 25, 2018
Approach to lowering extreme ultraviolet exposure dose for inorganic hardmasks for extreme ultraviolet patterning
IBM3 citations71
US9799534B1Oct 24, 2017
Application of titanium-oxide as a patterning hardmask
IBM2 citations71
US9711507B1Jul 18, 2017
Separate N and P fin etching for reduced CMOS device leakage
IBM3 citations71
US10229910B2Mar 12, 2019
Separate N and P fin etching for reduced CMOS device leakage
IBM0 citations51