Inventor
HOSACK CHAD MICHAEL
US3 patents
Patents
3 patentsUS9613833B2Apr 4, 2017
Methods and apparatus for wetting pretreatment for through resist metal plating
NOVELLUS SYSTEMS INC7 citations81
US10092933B2Oct 9, 2018
Methods and apparatuses for cleaning electroplating substrate holders
NOVELLUS SYSTEMS INC6 citations72
US10128102B2Nov 13, 2018
Methods and apparatus for wetting pretreatment for through resist metal plating
NOVELLUS SYSTEMS INC2 citations71