Inventor
BENJAMIN NEIL M P
US4 patents
Patents
4 patentsUS12283462B2Apr 22, 2025
Control of plasma formation by RF coupling structures
LAM RES CORP2 citations69
US9767996B2Sep 19, 2017
Application of powered electrostatic faraday shield to recondition dielectric window in ICP plasmas
LAM RES CORP3 citations69
US12198896B2Jan 14, 2025
Compact high density plasma source
LAM RES CORP1 citations59
US10460914B2Oct 29, 2019
Ferrite cage RF isolator for power circuitry
LAM RES CORP0 citations39