Inventor · disambiguated record
Robert Hieronymi
Also filed as: HIERONYMI ROBERT · HIERONYMI ROBERT G · HIERONYMI ROBERT GABRIEL
10 granted patents·4 pending applications·534 citations·filing 1983–2019
92Inventor score
Top patents by PatentIndex Score
14 records- 0195US5126028ASputter coating process control method and apparatusMATERIALS RESEARCH CORP·Filed 1990·Granted Jun 30, 1992·177 cites·72 claims
- 0292US4957605AMethod and apparatus for sputter coating stepped wafersMATERIALS RESEARCH CORP·Filed 1989·Granted Sep 18, 1990·118 cites·120 claims
- 0390US6299740B1Sputtering assembly and target thereforVEECO INSTR INC·Filed 2000·Granted Oct 9, 2001·60 cites·21 claims
- 0486US5130005AMagnetron sputter coating method and apparatus with rotating magnet cathodeMATERIALS RESEARCH CORP·Filed 1990·Granted Jul 14, 1992·53 cites·22 claims
- 0585US4428816AFocusing magnetron sputtering apparatusMATERIALS RESEARCH CORP·Filed 1983·Granted Jan 31, 1984·27 cites·19 claims
- 0684US10128083B2Ion sources and methods for generating ion beams with controllable ion current density distributions over large treatment areasVEECO INSTR INC·Filed 2016·Granted Nov 13, 2018·4 cites·20 claims
- 0779US6395146B2Sputtering assembly and target thereforVEECO INSTR INC·Filed 2001·Granted May 28, 2002·20 cites·21 claims
- 0879US5409590ATarget cooling and support for magnetron sputter coating apparatusMATERIALS RESEARCH CORP·Filed 1991·Granted Apr 25, 1995·36 cites·5 claims
- 0970US5391281APlasma shaping plug for control of sputter etchingMATERIALS RESEARCH CORP·Filed 1993·Granted Feb 21, 1995·22 cites·22 claims
- 1068US2015034476A1Deposition of thick magnetizable films for magnetic devicesVEECO INSTR INC·Filed 2014·Application pending·0 cites
- 1157US2007209932A1Sputter deposition system and methods of useVEECO INSTR INC·Filed 2006·Application pending·0 cites
- 1256US5080772AMethod of improving ion flux distribution uniformity on a substrateMATERIALS RESEARCH CORP·Filed 1990·Granted Jan 14, 1992·17 cites·22 claims
- 1353US2017025258A1Deposition of thick magnetizable films for magnetic devicesVEECO INSTR INC·Filed 2016·Application pending·0 cites
- 1438US2019259559A1Plasma bridge neutralizer for ion beam etchingVEECO INSTR INC·Filed 2019·Application pending·0 cites
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