Inventor
CHAE YUNG-SOOK
KR2 patents
Patents
2 patentsUS6590251B2Jul 8, 2003
Semiconductor devices having metal layers as barrier layers on upper or lower electrodes of capacitors
SAMSUNG ELECTRONICS CO LTD627 citations98
US6287965B1Sep 11, 2001
Method of forming metal layer using atomic layer deposition and semiconductor device having the metal layer as barrier metal layer or upper or lower electrode of capacitor
SAMSUNG ELECTRONICS CO LTD1,252 citations98