Inventor
JEON IN-SANG
KR11 patents
⚠️ This page may combine multiple inventors who share the name “JEON IN-SANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
8 patentsUS6399491B2Jun 4, 2002
Method of manufacturing a barrier metal layer using atomic layer deposition
SAMSUNG ELECTRONICS CO LTD342 citations99
US6348376B2Feb 19, 2002
Method of forming metal nitride film by chemical vapor deposition and method of forming metal contact and capacitor of semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD254 citations99
US6590251B2Jul 8, 2003
Semiconductor devices having metal layers as barrier layers on upper or lower electrodes of capacitors
SAMSUNG ELECTRONICS CO LTD627 citations98
US6478872B1Nov 12, 2002
Method of delivering gas into reaction chamber and shower head used to deliver gas
SAMSUNG ELECTRONICS CO LTD814 citations98
US6458701B1Oct 1, 2002
Method for forming metal layer of semiconductor device using metal halide gas
SAMSUNG ELECTRONICS CO LTD238 citations98
US6287965B1Sep 11, 2001
Method of forming metal layer using atomic layer deposition and semiconductor device having the metal layer as barrier metal layer or upper or lower electrode of capacitor
SAMSUNG ELECTRONICS CO LTD1,252 citations98
US7692196B2Apr 6, 2010
Memory devices and methods of manufacturing the same
SAMSUNG ELECTRONICS CO LTD4 citations63
US9230922B2Jan 5, 2016
Precursor composition for deposition of silicon dioxide film and method for fabricating semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations41