Inventor
SMIRNOV STANISLAV
US17 patents
⚠️ This page may combine multiple inventors who share the name “SMIRNOV STANISLAV”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML HOLDING NV
12 patentsUS7110082B2Sep 19, 2006
Optical system for maskless lithography
ASML HOLDING NV11 citations83
US7317583B2Jan 8, 2008
High numerical aperture projection system and method for microlithography
ASML HOLDING NV10 citations82
US10852247B2Dec 1, 2020
Variable corrector of a wave front
ASML HOLDING NV2 citations72
US7859647B2Dec 28, 2010
Lithographic apparatus and device manufacturing method
ASML HOLDING NV7 citations71
US7511798B2Mar 31, 2009
Off-axis catadioptric projection optical system for lithography
ASML HOLDING NV2 citations62
US7289277B2Oct 30, 2007
Relay lens used in an illumination system of a lithography system
ASML HOLDING NV3 citations62
US10724961B2Jul 28, 2020
Method and device for focusing in an inspection system
ASML HOLDING NV1 citations61
US6741362B2May 25, 2004
Method, system, and computer program product for determining refractive index distribution
ASML HOLDING NV2 citations61
US11126007B2Sep 21, 2021
Beam splitting prism systems
ASML HOLDING NV0 citations57
US11537055B2Dec 27, 2022
Lithographic apparatus, metrology apparatus, optical system and method
ASML HOLDING NV0 citations51
US9904173B2Feb 27, 2018
Method and apparatuses for optical pupil symmetrization
ASML HOLDING NV1 citations51
US10747010B2Aug 18, 2020
Beam splitting prism systems
ASML HOLDING NV0 citations47
ASML NETHERLANDS BV
5 patentsUS6778257B2Aug 17, 2004
Imaging apparatus
ASML NETHERLANDS BV953 citations97
US7023525B2Apr 4, 2006
Imaging apparatus
ASML NETHERLANDS BV13 citations82
US10107761B2Oct 23, 2018
Method and device for focusing in an inspection system
ASML NETHERLANDS BV5 citations71
US10495889B2Dec 3, 2019
Beam homogenizer, illumination system and metrology system
ASML NETHERLANDS BV0 citations51
US7834979B2Nov 16, 2010
Off-axis catadioptric projection optical system for lithography
ASML NETHERLANDS BV0 citations51