Inventor
LIU JUI-HSIUNG
TW5 patents
⚠️ This page may combine multiple inventors who share the name “LIU JUI-HSIUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
3 patentsUS11767336B2Sep 26, 2023
Organometallic cluster photoresists for EUV lithography
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11579531B2Feb 14, 2023
Organometallic cluster photoresists for EUV lithography
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations58
US12517427B2Jan 6, 2026
Photoresist, method of manufacturing a semiconductor device and method of extreme ultraviolet lithography
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51