Inventor · disambiguated record
Susumu Oogi
Also filed as: OOGI SUSUMU
5 granted patents·191 citations·filing 1997–2010
83Inventor score
Top patents by PatentIndex Score
5 records- 0193US5863682ACharged particle beam writing method for determining optimal exposure dose prior to pattern drawingTOSHIBA KK·Filed 1997·Granted Jan 26, 1999·107 cites·20 claims
- 0288US7750324B2Charged particle beam lithography apparatus and charged particle beam lithography methodNUFLARE TECHNOLOGY INC·Filed 2008·Granted Jul 6, 2010·12 cites·10 claims
- 0386US6313476B1Charged beam lithography systemTOSHIBA KK·Filed 1999·Granted Nov 6, 2001·56 cites·12 claims
- 0475US6346354B1Pattern writing methodTOSHIBA KK·Filed 2000·Granted Feb 12, 2002·12 cites·10 claims
- 0574US8188449B2Charged particle beam drawing method and apparatusSHIBATA HAYATO·Filed 2010·Granted May 29, 2012·4 cites·10 claims
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