Inventor
HEINTZE JOHANNES
NL4 patents
Patents
4 patentsUS7057705B2Jun 6, 2006
Lithographic apparatus, device manufacturing method, performance measuring method, calibration method and computer program
ASML NETHERLANDS BV18 citations79
US7016013B2Mar 21, 2006
Modulated lithographic beam to reduce sensitivity to fluctuating scanning speed
ASML NETHERLANDS BV7 citations65
US7868999B2Jan 11, 2011
Lithographic apparatus, source, source controller and control method
ASML NETHERLANDS BV3 citations59
US7297911B2Nov 20, 2007
Lithographic apparatus, illumination system, illumination controller and control method
ASML NETHERLANDS BV0 citations49