Inventor
KIDA NAOYA
JP5 patents
⚠️ This page may combine multiple inventors who share the name “KIDA NAOYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NHK SPRING CO LTD
4 patentsUS7503980B2Mar 17, 2009
Substrate supporting apparatus
NHK SPRING CO LTD527 citations96
US12000737B2Jun 4, 2024
Temperature sensor and heater unit
NHK SPRING CO LTD2 citations67
US12424421B2Sep 23, 2025
Apparatus and method for controlling a substrate temperature
NHK SPRING CO LTD0 citations56
US12354901B2Jul 8, 2025
Stage and manufacturing method thereof
NHK SPRING CO LTD0 citations54