Inventor · disambiguated record
Steffen Laufer
Also filed as: LAUFER STEFFEN
3 granted patents·0 citations·filing 2010–2011
39Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0139US8728924B2Gate electrodes of a semiconductor device formed by a hard mask and double exposure in combination with a shrink spacerBEYER SVEN·Filed 2011·Granted May 20, 2014·0 cites·9 claims
- 0237US9281200B2Enhanced patterning uniformity of gate electrodes of a semiconductor device by late gate dopingTHEES HANS-JUERGEN·Filed 2011·Granted Mar 8, 2016·0 cites·22 claims
- 0325US8133814B1Etch methods for semiconductor device fabricationLAUFER STEFFEN·Filed 2010·Granted Mar 13, 2012·0 cites·12 claims
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