P

Inventor

UDA SHUICHIRO

JP5 patents
⚠️ This page may combine multiple inventors who share the name “UDA SHUICHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

3 patents
US9466468B2Oct 11, 2016

Shower head, plasma processing apparatus and plasma processing method

TOKYO ELECTRON LTD8 citations80
US10910229B2Feb 2, 2021

Substrate treatment method

TOKYO ELECTRON LTD0 citations60
US11443952B2Sep 13, 2022

Etching method and etching device

TOKYO ELECTRON LTD0 citations59

UDA SHUICHIRO

2 patents
US8716144B2May 6, 2014

Method for manufacturing semiconductor device

UDA SHUICHIRO2 citations56
US9048191B2Jun 2, 2015

Plasma etching method

UDA SHUICHIRO0 citations31