Inventor
WINKLER JERELD LEE
US25 patents
Patents
25 patentsUS9890456B2Feb 13, 2018
Method and system for in situ formation of gas-phase compounds
ASM IP HOLDING BV466 citations99
US10340125B2Jul 2, 2019
Pulsed remote plasma method and system
ASM IP HOLDING BV413 citations98
US9605343B2Mar 28, 2017
Method for forming conformal carbon films, structures conformal carbon film, and system of forming same
ASM IP HOLDING BV481 citations98
US9589770B2Mar 7, 2017
Method and systems for in-situ formation of intermediate reactive species
ASM IP HOLDING BV481 citations98
US9484191B2Nov 1, 2016
Pulsed remote plasma method and system
ASM IP HOLDING BV470 citations98
US9228259B2Jan 5, 2016
Method for treatment of deposition reactor
ASM IP HOLDING BV515 citations98
US10858737B2Dec 8, 2020
Showerhead assembly and components thereof
ASM IP HOLDING BV8 citations84
US8894870B2Nov 25, 2014
Multi-step method and apparatus for etching compounds containing a metal
ASM IP HOLDING BV9 citations84
US11946136B2Apr 2, 2024
Semiconductor processing device
ASM IP HOLDING BV2 citations73
US12473641B2Nov 18, 2025
Apparatus for providing a gas mixture to a reaction chamber and method of using same
ASM IP HOLDING BV1 citations64
US12467137B2Nov 11, 2025
Semiconductor processing device
ASM IP HOLDING BV0 citations62
US11788190B2Oct 17, 2023
Liquid vaporizer
ASM IP HOLDING BV0 citations62
US10787741B2Sep 29, 2020
Method and system for in situ formation of gas-phase compounds
ASM IP HOLDING BV1 citations62
US10366864B2Jul 30, 2019
Method and system for in-situ formation of intermediate reactive species
ASM IP HOLDING BV1 citations62
US11492701B2Nov 8, 2022
Reactor manifolds
ASM IP HOLDING BV1 citations61
US12516414B2Jan 6, 2026
Reactor manifolds
ASM IP HOLDING BV0 citations58
US12472539B2Nov 18, 2025
Methods and apparatus for cleaning a vessel
ASM IP HOLDING BV0 citations58
US11891693B2Feb 6, 2024
Systems and methods for controlling vapor phase processing
ASM IP HOLDING BV0 citations55
US10774422B2Sep 15, 2020
Systems and methods for controlling vapor phase processing
ASM IP HOLDING BV1 citations55
US12546006B2Feb 10, 2026
Precursor delivery system and method therefor
ASM IP HOLDING BV0 citations52
US12276023B2Apr 15, 2025
Showerhead assembly for distributing a gas within a reaction chamber
ASM IP HOLDING BV0 citations51
US11967488B2Apr 23, 2024
Method for treatment of deposition reactor
ASM IP HOLDING BV0 citations51
USD1109284SJan 13, 2026
Flow control ring
ASM IP HOLDING BV0 citations48
US12467140B2Nov 11, 2025
Showerhead assembly and components
ASM IP HOLDING BV0 citations47
US11830731B2Nov 28, 2023
Semiconductor deposition reactor manifolds
ASM IP HOLDING BV0 citations47