Inventor
KAWAI JIRO
JP5 patents
Patents
5 patentsUS9240340B2Jan 19, 2016
Electrostatic chuck
SHINKO ELECTRIC IND CO10 citations81
US10147628B2Dec 4, 2018
Electrostatic chuck and semiconductor-liquid crystal manufacturing apparatus
SHINKO ELECTRIC IND CO3 citations70
US9252039B2Feb 2, 2016
Electrostatic chuck apparatus
SHINKO ELECTRIC IND CO2 citations60
US9887117B2Feb 6, 2018
Electrostatic chuck and semiconductor-liquid crystal manufacturing apparatus
SHINKO ELECTRIC IND CO1 citations49
US9660557B2May 23, 2017
Electrostatic chuck and method for manufacturing the electrostatic chuck
SHINKO ELECTRIC IND CO1 citations49