Inventor
TSAI CHE-EN
TW3 patents
Patents
3 patentsUS12444580B2Oct 14, 2025
Plasma processing apparatus and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12581941B2Mar 17, 2026
Semiconductor device and method of forming thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations55
US11652049B2May 16, 2023
Semiconductor device and method of forming thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations55