Inventor
LEE FU-SHENG
TW4 patents
Patents
4 patentsUS6179691B1Jan 30, 2001
Method for endpoint detection for copper CMP
TAIWAN SEMICONDUCTOR MFG21 citations90
US6225226B1May 1, 2001
Method for processing and integrating copper interconnects
TAIWAN SEMICONDUCTOR MFG17 citations77
US6528836B2Mar 4, 2003
Photomask ESD protection and an anti-ESD pod with such protection
TAIWAN SEMICONDUCTOR MFG7 citations69
US6503124B1Jan 7, 2003
Method for endpoint detection for copper CMP
TAIWAN SEMICONDUCTOR MFG2 citations60